Simulation of Micromirrors
Typical layout of a micromirror
For electrostatically actuated micromirrors we investigated the effects of residual stresses on their natural frequencies.
First two vibration modes of a micromirror, the second being the operational torsional one
In a fully nonlinear analysis, we also modelled the damping due to the surrounding fluid when large displacements are involved.
Damping simulation: pressure contour and velocity field around the tilting micromirror